Основы микроэлектроники : учебник

The book outlines the main directions of development of microelectronics: The physical foundations, construction, technology, structural elements and aspects of the design of integrated circuits (ICs) and large-scale integrated circuits (LSIs). Are considered separate processes, circuit solutions, computer design techniques and manufacturing microelectronic products. The textbook is designed for students of technical colleges and universities, students in microelectronics.